High speed in-vacuum flat panel display handler

Details High speed in-vacuum flat panel display handler High speed in-vacuum flat panel display handler

1998-03-13

1999-12-14

Olszewski, Robert P.

Material or article handling

Process

Of moving material between zones having different pressures...

414217, 414221, 414939, H01J 3718

Patent

active

060009055

ABSTRACT:
Transport of a workpiece into and out of high vacuum conditions is achieved using a vacuum handler having an ante-chamber which buffers a vacuum lock and other mechanically vulnerable components from high pressure differences. During loading of the workpiece, the ante-chamber is vented to atmospheric pressure while the vacuum lock door is sealed closed. The antechamber is then opened and receives the incoming workpiece from the exterior of the vacuum handler. The ante-chamber is then closed and evacuated to the pressure level of the vacuum lock, which is only opened once this pressure level is achieved. The vacuum lock receives the workpiece and is evacuated to the pressure of the main vacuum chamber of the vacuum handler and then opened thereto. An elevator assembly transports the workpiece into the vacuum chamber for processing. The process is reversed during unloading of the workpiece from the vacuum handler following processing completion.

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