High speed, high yield CMOS/SOS process

Details High speed, high yield CMOS/SOS process High speed, high yield CMOS/SOS process

1975-06-16

1977-01-11

Lovell, C.

Metal treatment

Compositions

Heat treating

148174, 148175, 148176, 148188, 357 42, 357 91, H01L 21265

Patent

active

040025012

ABSTRACT:
A process for producing complementary metal-oxide-semiconductor/silicon-on-sapphire (CMOS/SOS) devices wherein undesirable effects of phosphorous on sapphire are avoided.

REFERENCES:
patent: 3461361 (1969-08-01), Delivorias
patent: 3484662 (1969-12-01), Hagon
patent: 3636418 (1972-01-01), Burns et al.
patent: 3745072 (1973-07-01), Scott, Jr.
patent: 3749614 (1973-07-01), Boleky et al.
patent: 3796929 (1974-03-01), Nicholas et al.

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