Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1992-05-12
1994-05-31
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 725, G01R 1073
Patent
active
053172566
ABSTRACT:
A photoresponsive pulser/sampler system for investigating electrical signals and responses in VLSI systems employs a microtip which communicates electrically and mechanically with the device under test, and electrically with an electrode via a photoresponsive gate. The photoresponsive gate is formed of interdigitated electrodes which have interdigital spacings therebetween on the order of 1 .mu.m. The structure of the invention is operable in the dual modalities of probe and pulser which share a common probe tip. Simultaneous implementation of the pulser and sampler functions is achieved with the use of a lock-in amplifier and the technique of difference frequency mixing, where the pulser optical pulse frequency is f.sub.1 and the gate optical pulse frequency is f.sub.2. Multiple photoresponsive gates coupled to a common probe tip and having respective electrodes are disclosed for achieving respective pulsing and sampling functions, and also for effecting S-parameter measurements. The lock-in amplifier is tuned to the difference between the two frequencies (f.sub.2 -f.sub.1). Piezoelectric apparatus is employed for translating the probe tip over the device under test.
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Karlsen Ernest F.
University of Michigan
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