High-speed electronic carrier-injection modulator based on...

Optical waveguides – Temporal optical modulation within an optical waveguide – Electro-optic

Reexamination Certificate

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C385S003000, C385S001000, C385S008000

Reexamination Certificate

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11120769

ABSTRACT:
An opto-electronic modulator includes a Mach-Zehnder structure that comprises p+in+-diodes in both arms of the Mach-Zehnder structure. The Mach-Zehnder structure is formed by waveguides so as to confine an optical mode in the opto-electronic modulator.

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Samara-Rubio, D. et al., “A gigahertz silicon-on-insulator Mach-Zehnder modulator,” Optical Fiber Communication Conference, Los Angeles, Feb. 23-25, 2004, Piscataway NJ, Feb. 26, 2004, pp. 701-703.
Boussey et al. “Optoelectronic integration in silicon-on-insulator technologies,” Semiconductor Conference, 1998. New York, NY, vol.2 Oct. 6, 1998, pp. 407-415.
Fischer, U. et al., “Optical Waveguide Switches in Silicon Based on Ge-Indiffused Waveguides,” Photonics Technology Letters, Inc. New York, NY, vol. 6 No. 8, Aug. 1, 1994. pp. 978-980.
Barrios, C. A. et al. “Electrooptic Modulation of Silicon-on-Insulator Submicrometer-Size Waveguide Devices,” Journal of Lightwave Technology, vol. 21, No. 10, Oct. 2003 pp. 2332-2339.
Dainesi, P. et al., “CMOS Compatible Fully Integrated Mach-Zehnder Interferometer in SOI Technology,” Photonics Technology Letters, Inc., New York, vol. 12, No. 6, Jun. 2000, pp. 660-662.

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