High speed deformable mirror light valve

Optical: systems and elements – Light control by opaque element or medium movable in or... – Electro-mechanical

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Details

359230, 359291, 359295, 359900, 347135, 347255, G02B 2602, B41J 247

Patent

active

061477893

ABSTRACT:
A deformable mirror light valve comprised of an array of silicon nitride ribbons, metalized to reflect light. Each ribbon is electrostatically deformed to form a cylindrical mirror. Each deformable ribbon modulates the light of one pixel by focusing the reflected light through a slit. An alternative embodiment focuses the light onto a stop. The ribbon structure has a fast response time combined with high contrast.

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