High speed bonding tool contact detector

Metal fusion bonding – Process – With condition responsive – program – or timing control

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Details

228 8, 228 11, 2281101, H01L 21607

Patent

active

056452101

ABSTRACT:
There is provided an ultrasonic generator of the type having a power amplifier. The output of the power amplifier is connected across and through an ultrasonic transducer which holds a bonding tool to be engaged on a bonding target. A current sufficient to induce a resonant frequency is applied across the ultrasonic transducer in air and before touch down on the bonding target while continuously monitoring the current and voltage across the transducer. A touch down detector circuit is coupled to the current and voltage being monitored and initiates a touch down signal which is employed to control these Z-axis drive motor of an automatic wire bonder within several microseconds of the actual touch down time.

REFERENCES:
patent: 4824005 (1989-04-01), Smith, Jr.
patent: 5046654 (1991-09-01), Yamazaki et al.
patent: 5357423 (1994-10-01), Weaver et al.
patent: 5386936 (1995-02-01), Mochida et al.
patent: 5494207 (1996-02-01), Asanasavest

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