Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2006-11-07
2006-11-07
Gabor, Otilia (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
C257S431000, C257S443000, C257S449000, C438S048000, C385S129000, C385S132000
Reexamination Certificate
active
07132656
ABSTRACT:
According to this invention, silicon-based photodetectors using waveguides formed with silicide regions can have high speed and high efficiency for near IR applications. Utilizing the unique properties of silicides, the proposed method provides a simple and elegant way to implement a photodetector design in which photogenerated carriers travel perpendicular to the direction of light propagation. Therefore, the speed and quantum efficiency of the photodetector may be optimized independently. This device configuration may be implemented in one of the two approaches: (a) waveguides formed through surface silicidation of a silicon-based layer of a substrate (b) waveguides formed through silicidation of ridge waveguide side-walls of a silicon-based layer of a substrate; The use of mature silicon technology promises low cost of production and other benefits.
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Janz Siegfried
Xu Dan-Xia
(Marks & Clerk)
Budd S. Mark
Gabor Otilia
National Research Council of Canada
Sung Christine
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