High spatial and time resolution measuring apparatus

Details High spatial and time resolution measuring apparatus High spatial and time resolution measuring apparatus

1989-04-19

1990-04-24

McGraw, Vincent P.

Optics: measuring and testing

By shade or color

With color transmitting filter

250213VT, 356318, 356432, G01N 2164, G01N 2159

Patent

active

049203860

ABSTRACT:
A high spatial and time resolution measuring apparatus for optically measuring a fine area in an object to be measured, the apparatus comprising a stage for mounting a specimen thereon, a light source for generating a first light, a first optical system for leading the first light from the light source to the specimen, an objective lens for magnifying an image of a second light from the specimen, a second optical system for imaging a part of the image in a form of a slit, a streak tube having a photocathode at a position of image formation of the second optical system for receiving the part of the image and forming a streak image thereof, a housing for shielding the first optical system, the objective lens and the second optical system from stray light.

REFERENCES:
patent: 4195930 (1980-04-01), Delhaye et al.
patent: 4327285 (1982-04-01), Bradley
patent: 4444317 (1984-04-01), Wick et al.
patent: 4600306 (1986-07-01), Hara et al.
patent: 4611920 (1986-09-01), Tsuchiya
patent: 4630925 (1986-12-01), Schiller et al.
patent: 4662747 (1987-05-01), Isaacson et al.

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