High sensitivity, silicon-based, Microcalorimetric gas sensor an

Details High sensitivity, silicon-based, Microcalorimetric gas sensor an High sensitivity, silicon-based, Microcalorimetric gas sensor an

1995-05-26

1998-09-01

Dote, Janis L.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Thermally responsive

438 48, 438 53, 216 2, 216 57, H01L 3504

Patent

active

058010700

ABSTRACT:
A gas sensor and a method for measuring gas constituents, particularly exhaust gas constituents for an internal combustion engine, comprising a pair of polysilicon plates, each plate supporting a pair of resistors, one serving as a heater and the other as a thermometer, one plate being coated with a catalyst to promote combustion of unburned combustible gas constituents, wherein provision is made for reducing temperature gradients across the plates and for effecting temperature uniformity of the catalyst while maintaining a high degree of structural integrity.

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