High-sensitivity, silicon-based, microcalorimetric gas sensor

Details High-sensitivity, silicon-based, microcalorimetric gas sensor High-sensitivity, silicon-based, microcalorimetric gas sensor

1994-06-09

1995-09-19

Warden, Robert J.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Calorimeter

422 95, 374 31, 374 37, 431 12, 431 89, 431 76, 60602, 60273, 2041531, 204424, G01K 1700, G01N 2520

Patent

active

054513715

ABSTRACT:
A gas sensor for measuring gas constituents, particularly exhaust gas constituents for an internal combustion engine, comprising a pair of polysilicon plates, each plate supporting a pair of resistors, one serving as a heater and the other as a thermometer, one plate being coated with a catalyst to promote combustion of unburned combustible gas constituents, wherein provision is made for reducing temperature gradients across the plates and for effecting temperature uniformity of the catalyst while maintaining a high degree of structural integrity.

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"A Low Power Integrated Catalytic Gas Sensor", P. Krebs et al, Sensors and Actuators B, 12 (1993), pp. 1-4.

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