High-sensitivity positive-working photoresist composition

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

430191, 430193, G03F 7023

Patent

active

056019610

ABSTRACT:
Disclosed is an improved positive-working photoresist composition comprising an alkali-soluble resin as a film-forming agent and a quinone diazide group-containing compound as a photosensitive agent. The most characteristic feature of the inventive composition consists in the unique formulation of the alkali-soluble resin which is a combination of two or three kinds of novolac resins selected from novolac resins (a), (b1) or (b2) and (c1) or (c2), each of which is characterized by the unique formulation of the phenolic compounds as a mixture to be subjected to a condensation reaction with an aldehyde compound to form the novolac resin. Namely, the phenolic mixture for the novolac (a) consists of m- and p-cresols, the phenolic mixture for the novolac (b1) consists of m-cresol and a xylenol, the phenolic mixture for the novolac (b2) consists of m- and p-cresols and a xylenol, the phenolic mixture for the novolac (c1) consists of m-cresol and a trimethyl phenol and the phenolic mixture for the novolac (c2) consists of m- and p-cresols and a trimethyl phenol each in a specified molar proportion of the constituent phenolic compounds.

REFERENCES:
patent: 4988601 (1991-01-01), Ushirogouchi et al.
patent: 5302490 (1994-04-01), Fedynyshyn et al.
patent: 5380618 (1995-01-01), Kokubo et al.
patent: 5413896 (1995-05-01), Kajita et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

High-sensitivity positive-working photoresist composition does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High-sensitivity positive-working photoresist composition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-sensitivity positive-working photoresist composition will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-340874

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.