Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate
2006-03-07
2006-03-07
Luu, Thanh X. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
C348S088000
Reexamination Certificate
active
07009163
ABSTRACT:
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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Gur-Arie Itay
Katzir Yigal
Malinovich Yacov
Luu Thanh X.
Orbotech Ltd.
Sohn Seung C.
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