High-sensitivity method for detecting differences between...

Details High-sensitivity method for detecting differences between... High-sensitivity method for detecting differences between...

2005-12-21

2010-12-07

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

Standard

Surface standard

Reexamination Certificate

active

07847930

ABSTRACT:
A method for detecting differences between physically measurable properties of a sample and a reference sample. A two-dimensional reference field is generated and first and second two-dimensional patterns are produced respectively from the reference sample and the sample. A correction is made to sample response functions to eliminate time-dependent and location-dependent fluctuations of the detector.

REFERENCES:
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patent: 1 315 318 (1973-05-01), None
patent: 2005 019808 (2005-03-01), None

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