High sensitivity, large detection area particle sensor for vacuu

Details High sensitivity, large detection area particle sensor for vacuu High sensitivity, large detection area particle sensor for vacuu

1990-09-14

1992-07-21

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356336, G01N 1506

Patent

active

051325489

ABSTRACT:
A particle sensor which employs the principle that a particle passing through an intense laser beam will scatter light to a photodetector which then generates a measurable signal is provided. The particle sensor uses prisms and a cylindrical lens to compress the laser beam to make it very thin along the axis of particle motion but very wide in the plane perpendicular to particle motion, thereby simultaneously providing high beam intensity for enhanced sensitivity and a large detection area. The optical components of the sensor are mounted on separate sections which allows the optical components to be separately aligned and changed so that the sensor may be easily adapted to various applications.

REFERENCES:
patent: 4226533 (1980-10-01), Snowman
patent: 4410237 (1983-10-01), Veldkamp
patent: 4545677 (1985-10-01), Chupp
patent: 4739177 (1988-04-01), Borden
patent: 4755052 (1988-07-01), Giglio et al.
patent: 4804853 (1989-02-01), Borden et al.
patent: 4920275 (1990-04-01), Itoh

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