High sensitivity, high resolution, solid state x-ray imaging dev

Details High sensitivity, high resolution, solid state x-ray imaging dev High sensitivity, high resolution, solid state x-ray imaging dev

1991-09-19

1993-02-16

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

25037009, 250367, G01T 120, G01T 1202

Patent

active

051873699

ABSTRACT:
A radiation imager includes a photodetector array having topographically patterned surface features, which include support islands disposed over the active portion of one or more photodetectors in the photodetector array. A structured scintillator array having individual columnar scintillator elements is disposed in fixed relation to the photodetector array so that the individual scintillator elements are disposed on scintillator support islands. A barrier layer is disposed between the support islands and the photodetector array to minimize chemical interactions between the material forming the support island and the underlying photodetector array during the fabrication process. After the support islands have been patterned, the scintillator elements are grown by selectively depositing scintillator material on the support islands.

REFERENCES:
patent: 4011454 (1977-03-01), Lubowski et al.
patent: 4694177 (1987-09-01), Akai
patent: 4870279 (1989-09-01), Cueman et al.
patent: 4906850 (1990-03-01), Beerlage
patent: 4933042 (1990-06-01), Eichelberger et al.
patent: 4940901 (1990-07-01), Henry et al.
"Radiation Detection With Evaporated CSI(TI) Coupled to a-Si:H Photodiode Layers" I. Fujieda et al., vol. 219 Materials Research Society Symposium Proceedings, pp. 193-194.

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