High sensitivity focal sensor for electron beam and high resolut

Details High sensitivity focal sensor for electron beam and high resolut High sensitivity focal sensor for electron beam and high resolut

1982-09-22

1985-01-15

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250201, 355 55, G01B 902

Patent

active

044935552

ABSTRACT:
A three slit interferometric focus control device capable of focal positioning accuracies on the order of 300 angstroms. The device includes a zero path Michelson interferometer with reference and movable legs comprising, respectively, an annular reference mirror and the surface to be brought into position of best focus. A three slit plate positioned between the beamsplitter and energy detection device allows interference of light reflected off the movable and reference surfaces, creating an amplitude modulation signal. The energy detection device will measure a minimum energy intensity at the position of best focus.

REFERENCES:
patent: 2462292 (1949-02-01), Snyder, Jr.
patent: 3588254 (1971-06-01), Rhoades
patent: 4336997 (1982-06-01), Ross et al.

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