Electric heating – Metal heating – By arc
Patent
1980-09-03
1982-09-07
Reynolds, B. A.
Electric heating
Metal heating
By arc
156646, 156345, 204192E, 219121PD, 219121PF, 219121PG, B23K 900, H01L 21306
Patent
active
043485774
ABSTRACT:
A parallel-plate type gas plasma etching apparatus for etching a workpiece having a multilayer structure having a high etch rate ratio. A pair of parallel-plate electrodes are disposed in a reactor. A workpiece to be etched is disposed upon one of the electrodes. The reactor is held at a predetermined pressure and an etching gas supplied thereto. Rf power is applied between the electrodes with the positive terminal of the rf generator being coupled to the electrode upon which the workpiece is disposed. The frequency of the rf power is 10 MHz or less.
REFERENCES:
patent: 3664942 (1972-05-01), Hauas et al.
patent: 3994793 (1976-11-01), Harvilchuck et al.
patent: 4062102 (1977-12-01), Lawrence et al.
patent: 4085022 (1978-04-01), Wechsung et al.
patent: 4253907 (1981-03-01), Parry et al.
Itakura Hideaki
Komiya Hiroyoshi
Toyoda Hiroyasu
Paschall M. H.
Reynolds B. A.
Vlsi Technology Research Association
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