Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure
Patent
1992-06-08
1994-01-11
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
Light responsive structure
257201, 257453, 257441, 437 5, H01L 2714
Patent
active
052784355
ABSTRACT:
The invention is an Al.sub.x Ga.sub.1-x N ultraviolet detector with extremely high responsivity at over 200 to 365 nanometers and a very sharp long wavelength cutoff. The active layer for the sensors is a single crystal Al.sub.x Ga.sub.1-x N preferably deposited over a basal plane sapphire substrate using a switched atomic layer epitaxy process.
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Blasingame Margaret C.
Kahn Muhammad A.
Kuznia Jon N.
Olson Donald T.
Van Hove James M.
APA Optics, Inc.
Mintel William
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