Scanning-probe techniques or apparatus; applications of scanning – Particular type of scanning probe microscopy or microscope;...
Reexamination Certificate
2008-10-08
2011-12-06
Kim, Robert (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Particular type of scanning probe microscopy or microscope;...
C850S005000, C850S010000, C250S306000, C250S307000, C250S308000, C250S310000, C250S311000
Reexamination Certificate
active
08074292
ABSTRACT:
The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.
REFERENCES:
patent: 2006/0113470 (2006-06-01), Gribb
patent: 2007/0073364 (2007-03-01), Meissner et al.
patent: 2007-40966 (2007-02-01), None
A. Cerezo, et al., “Design of a Scanning Atom Probe with Improved Mass Resolution”, Review of Scientific Instruments, Aug. 1, 2000, pp. 3016-3023, vol. 71,No. 8, American Institute of Physics, Melville, NY, USA. XP012038436.
A. Cerezo, et al., “Einzel Lenses in Atom Probe Designs”, Surface Science Netherlands, Apr. 1991, pp. 460-466, vol. 246, No. 1-3. XP007904810.
Bostel Alain
Deconihout Bernard
Renaud Ludovic
Yavor Mikhail
Baker & Hostetler LLP
Cameca
Kim Robert
Sahu Meenakshi
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