Electricity: measuring and testing – Magnetic – Magnetic test structure elements
Reexamination Certificate
2005-08-16
2005-08-16
LeDynh, Bot (Department: 2862)
Electricity: measuring and testing
Magnetic
Magnetic test structure elements
C324S244000
Reexamination Certificate
active
06930479
ABSTRACT:
A scanning magnetic microscope (SMM) (20) includes a current source (27) for imposing an excitation current to a conductor-under-test (CUT) (70) and, if applicable, a reference current to a proximally located reference conductor (72). During accelerated testing, the SMM (20) corrects thermal drift of the CUT (70) via the reference conductor (72). A sensor (21) may be cooled by a heat sink (31) such as a pump (33) directing an airstream or a coldfinger (80). The sensor may switch from a contact to a non-contact mode of scanning the CUT (70). The SMM (20) and methods are useful for measuring electromigration in a CUT (70) as it occurs, for assembling the images into time lapsed representations such as a shape of the CUT (70), for measuring electromigration as a function of a cross sectional area of a wire under a dielectric material (DM) (78), for determining electrical parameters of the CUT (70), and for optimizing a thickness of a DM (78) over a CUT (70). The SMM (20) and methods are further useful for measuring morphological changes in a CUT (70) due to other stressing conditions, such as temperature, excitation current, physical stress(es), hostile environment, aging, semiconductor “burn-in”, or irradiation.
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Schrag Benaiah D.
Xiao Gang
Brown University Research Foundation
Harrington & Smith ,LLP
LeDynh Bot
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