High resolution remote position detection using segmented gratin

Details High resolution remote position detection using segmented gratin High resolution remote position detection using segmented gratin

1995-08-17

1997-08-05

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250548, 356401, G01B 1100

Patent

active

056545401

ABSTRACT:
Remote positioning to submicron accuracy is based on comparison of two interference gratings, the first of constant phase, and the second segmented. Positioning corresponds with equal segment-by-segment overlap of an image of one grating superimposed on the other.

REFERENCES:
patent: 5521995 (1996-05-01), Brazas
patent: 5596413 (1997-01-01), Stanton et al.
Sugimoto, D., et al., Optical/Laser Microlithography II, SPIE, vol. 1088, pp. 258-267 (1989).
Photomicrography A Comprehensive Treatise, vol. 2, John Wiley & Sons, Inc. pp. 527-540 (1970).
M. Francon, Optical Interferometry, Academic Press, pp. 87-89 (1966).
Steinmetz, C., et al., Interferometric Metrology, SPIE, vol. 816, pp. 79-94 (1987).
Saleh, B.E.A., et al., Fundamentals of Photonics, John Wiley and Sons, pp. 800-806.
Born, M., et al. Principles of Optics, The MacMillan Company, N.Y. pp. 401-404 (1964).

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