High resolution reduction catadioptric relay lens

Details High resolution reduction catadioptric relay lens High resolution reduction catadioptric relay lens

1991-08-01

1993-08-31

Arnold, Bruce Y.

Optical: systems and elements

Lens

With reflecting element

359720, 359726, G02B 1700

Patent

active

052414230

ABSTRACT:
An optical system of a NX reduction catadioptric relay lens having sub-half micron resolution over the ultraviolet band width is described. A spherical mirror with a stop at the mirror is used to work at substantially the desired reduction ratio and the desired high numerical aperture sufficient to provide the desired high resolution. A beam splitting cube with appropriate coatings is used to form an accessible image of an object on an image plane. Refracting correctors in the path of the slow beam incident on the mirror and in the path of the fast beam reflected on the mirror are designed to fix the aberrations of the image formed by the mirror. The beam splitter coatings are chosen in such a way that beams reflected from and transmitted therethrough suffer no net aberration as a result of multiple reflections within the thin film beam splitter coatings and therefore are substantially free of aberration, distortion and apodization which would result from the beam splitting surface in the absence of these coatings.

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Copy of Rosenbluth application filed Apr. 22, 1988, Ser. No. 07/185,187 along with Info. Discl. Statement for Rosenbluth appl. and prior art cited by Examiner.

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