Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2005-03-22
2005-03-22
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S053000
Reexamination Certificate
active
06870604
ABSTRACT:
A method for increasing a scan rate in a photolithography system by increasing a unit travel length while maintaining a minimum resolution is provided. The method includes determining the minimum resolution and a pixel spacing distance equal to the unit travel length. The method also includes calculating a window size based on the minimum resolution and the pixel spacing distance. A plurality of windows of the calculated size are established so that a pixel in a first window is offset from a pixel in a second window by the minimum resolution in a first dimension and the pixel spacing distance in a second dimension, and one of the plurality of windows is selected for projection onto a subject.
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Ball Semiconductor Inc.
Fuller Rodney
Haynes and Boone LLP
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