Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1991-01-29
1993-03-02
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356358, 356349, G01B 902
Patent
active
051913917
ABSTRACT:
What is disclosed is an improved high resolution laser interferometer (10) which gains an increase in available resolution by means of increasing the number of reflections of a measurement laser beam (16) from a plane mirror (20) and thus by increasing the number of Doppler shifts undergone by the measurement laser beam (16). The inventive arrangement of optics combines a polarizing cube (24), a cube corner retroreflector (28), a right angle reflector (30), and one or more quarter wave plates (32) and (34) to produce the desired result. In the practice of the present invention, the measurement laser beam (16) is directed from a laser head (12) such that it is affected four times by any movement of the objective plane mirror (20) in a measurement plane (22) before being compared to a reference laser beam (16) in a signal analysis unit (14). The reference laser beam (16) is routed in a conventional manner to the signal analysis unit (14).
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Siddal and Baldwin, Some recent developments in Laser Interferometery, undated.
Excel Precision
Hughes Michael J.
Turner Samuel A.
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