High resolution piggyback linear motor design for placement syst

Details High resolution piggyback linear motor design for placement syst High resolution piggyback linear motor design for placement syst

1990-03-22

1992-06-30

Ip, Paul

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318577, 318603, 318135, 318687, 340710, G05B 106

Patent

active

051266482

ABSTRACT:
A positioning system for accurately positioning components and the like in which a two-dimensional linear motor moves upon an air bearing across a large platen having a predetermined grid pattern yielding reasonably good resolution. A second two-dimensional positioning assembly of extremely fine resolution is secured to the linear motor arranged to traverse the large platen. Location sensors are provided in closed loop feedback system for detecting the X and Y positions. Coarse resolution is obtained by operating the first two-dimensional linear motor and fine resolution is obtained by operating the second two-dimensional positioning assembly, preferably after disabling the air bearing. The fine positioning system may also include a driver motor for rotating a manipulator arranged upon the second positioning system to correct for any angular misalignment of the component being placed by the manipulator.

REFERENCES:
patent: 3786332 (1974-01-01), Hepner et al.
patent: 4187051 (1980-02-01), Kirsch et al.
patent: 4645993 (1987-02-01), Naito et al.
patent: 4654571 (1987-03-01), Hinds
patent: 4823062 (1989-04-01), Hoffman et al.
patent: 4890241 (1989-12-01), Hoffman et al.
patent: 4968924 (1990-11-01), Mori et al.

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