High resolution piezoelectric motor

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S316010

Reexamination Certificate

active

10522309

ABSTRACT:
A piezoelectric motor for moving and positioning a load, the motor comprising: a piezoelectric vibrator having a plurality of electrodes and a coupling surface which is pressed to a load; and a power supply selectively operable to electrify at least one vibrator electrode with time varying voltage to generate vibrations in the coupling surface that step the load to a desired position or to electrify at least one vibrator electrode with DC voltage to displace the coupling surface and move thereby the load to a desired position, which DC voltage the power supply maintains to maintain the load at the desired position.

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patent: 0938144 (1999-08-01), None
patent: WO 00/74153 (2000-12-01), None
Mori, K. et al. “Ultrasonic linear motor for a high precision X—Y stage”. IEEE 1989 Ultrasonics Symposium Proceedings, Montreal, Que. Canada. pp. 657-660.

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