High resolution particle spectrometer

Details High resolution particle spectrometer High resolution particle spectrometer

1985-08-26

1987-04-21

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250396R, 3133611, H01J 4948, H01J 4000

Patent

active

046599266

ABSTRACT:
A spectrometer for high-resolution particle energy loss spectroscopy is described. Specifically, the high-resolution particle energy loss spectrometer of the present invention comprises: source means for producing a collimated beam of particles; first stage monochromator means for selecting particles within a specified energy range; intermediate particle lens means for collimating, accelerating and decelerating the particles exiting from the first stage monochromator means; second stage monochromator means for selecting particles within a specified energy range; exit particle focusing means; input particle focusing means; cylindrical analyzer means for selecting particles with a specified energy range; and detector means for detecting impinging particles. The spectrometer described herein obtains higher system resolution at a given output current than other spectrometers known in the art.

REFERENCES:
patent: 3448263 (1969-06-01), Le Boutet et al.
patent: 3541328 (1970-11-01), Enge
patent: 4300045 (1981-11-01), Ibach et al.
patent: 4412131 (1983-10-01), Froitsheim
"High Resolution Electron Loss Spectrometer ELS. 22" Leybold-Heraeus GmbH, 1977/78.
"Design of Electron Spectrometers for Surface Analysis" Chapter 2, Roy, D. and J. D. Carette, Current Topics in Physics: Electron Spectroscopy for Surface Analysis, H. Ibach, ed., Springer-Verlog Berlin Heidleberg (New York 1977).

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