Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate
2005-07-26
2005-07-26
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
C430S030000, C430S322000
Reexamination Certificate
active
06921615
ABSTRACT:
A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
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Bailey Todd
Choi Byung J.
Colburn Matthew
Sreenivasan Sidlgata V.
Board of Regents , The University of Texas System
Brooks Kenneth C.
Young Christopher G.
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