High resolution objective lens assembly

Details High resolution objective lens assembly High resolution objective lens assembly

2003-12-04

2008-11-11

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Compound lens system

With curved reflective imaging element

Reexamination Certificate

active

07450300

ABSTRACT:
A high resolution objective lens assembly (20, 120, 220, 320) is implemented with refractive lens elements made of modified fused silica for operation at deep ultraviolet (DUV) wavelengths to reduce birefringence-caused image aberrations. The high resolution is achieved by an optical design that is characterized by a very high numerical aperture (NA) and short wavelength operation.

REFERENCES:
patent: 6208459 (2001-03-01), Coon et al.
patent: 6483638 (2002-11-01), Shafer et al.
patent: 2001/0048083 (2001-12-01), Hagiwara

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