Optics: measuring and testing – Dimension
Reexamination Certificate
2011-03-28
2011-11-01
Lauchman, Layla (Department: 2877)
Optics: measuring and testing
Dimension
C356S237200, C356S369000, C356S620000
Reexamination Certificate
active
08049903
ABSTRACT:
An optical metrology method is disclosed for evaluating the uniformity of characteristics within a semiconductor region having repeating features such a memory die. The method includes obtaining measurements with a probe laser beam having a spot size on the order of micron. These measurements are compared to calibration information obtained from calibration measurements. The calibration information is derived by measuring calibration samples with the probe laser beam and at least one other technology having added information content. In the preferred embodiment, the other technology includes at least one of spectroscopic reflectometry or spectroscopic ellipsometry.
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Grodnensky Ilya
Opsal Jon
Pois Heath
KLA-Tencor Corporation
Lauchman Layla
Morrison & Foerster / LLP
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