High-resolution light microscope using coherent light reflected

Details High-resolution light microscope using coherent light reflected High-resolution light microscope using coherent light reflected

1991-03-24

1993-11-09

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356237, H01J 314, G11B 700

Patent

active

052605620

ABSTRACT:
An optical microscope for examining surface features of a target surface, at a resolution, in one dimension, in the picometer-to-nanometer range. The microscope includes a laser for use in producing a coherent output light beam, a lens for focusing the output beam onto a target, and a photodetector for measuring the power output of the beam. The focused beam is moved relative to the target surface in a defined position-dependent pattern, with a portion of the light reflected from the target surface being reflected back into the laser. Changes in the measured power of the laser are converted to position-dependent surface displacements, in the direction of the output beam.

REFERENCES:
patent: 3409370 (1968-11-01), King et al.
patent: 3643015 (1972-02-01), Davidovits et al.
patent: 3901597 (1975-08-01), White
patent: 4011748 (1977-03-01), Bond et al.
patent: 4130360 (1978-12-01), Courtenay
patent: 4630276 (1986-12-01), Moran
patent: 4760385 (1988-07-01), Jansson et al.
patent: 4806778 (1989-02-01), Yamamoto et al.
patent: 4902966 (1990-02-01), Brust et al.
patent: 5029023 (1991-07-01), Bearden et al.
Clunie, D. M., and Rock, N. H., J. Sci. Instrum. 41:489-492 (1964).
Sarid, D., et al., Optics Letters 13(12):1057-1059 (1988).
"Science in British Industry," New Scientist 323:180 (1963).

Affiliated with

Also associated with

Rating

High-resolution light microscope using coherent light reflected does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High-resolution light microscope using coherent light reflected , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-resolution light microscope using coherent light reflected will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1145045