Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-01-27
1995-12-26
Dzierzynski, Paul M.
Photocopying
Projection printing and copying cameras
Step and repeat
359 11, 359 27, 359 28, 359599, G03B 2700
Patent
active
054792380
ABSTRACT:
The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.
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Dzierzynski Paul M.
Jr. John Juba
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