High resolution high speed film measuring apparatus and method

Details High resolution high speed film measuring apparatus and method High resolution high speed film measuring apparatus and method

1993-12-21

1996-04-09

Willis, Davis L.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

356381, G01B 1106

Patent

active

055064078

ABSTRACT:
A high speed high resolution solid film measuring apparatus and method uses coherent monochromatic light by passing the coherent monochromatic light through the solid film and referencing the degree of absorption to known or on-line measured reference values. The measuring apparatus and method accounts for difference in clarity and translucency to derive a running analysis of the solid film thickness. Resolution and speed of the measuring apparatus provides for the adaptation of the measuring device to on-line manufacturing systems as part of a feedback control loop through the manufacturing process.

REFERENCES:
patent: 3737234 (1973-06-01), Shibata et al.
patent: 3854044 (1974-12-01), Stay
patent: 4623254 (1986-11-01), Imose
patent: 4672196 (1987-06-01), Canino
patent: 4954719 (1990-07-01), Harris

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