High resolution, high efficiency I.R. LED printing array fabrica

Metal working – Plural diverse manufacturing apparatus including means for... – Common reciprocating support for spaced tools

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29576E, 148175, 156653, H01L 736

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active

046399992

ABSTRACT:
An IR LED array and method of fabrication having a GaAs wafer with one surface metallized to form a common LED contact. Epitaxially formed on this wafer is a GaAs/GaAlAs heterostructure with successive layers of Ga.sub.1-x Al.sub.x As-n, GaAs-p, and Ga.sub.1-y Al.sub.y As-p on the other surface, followed by an electrical contact layer of GaAs-p+ and an insulating layer of SiO.sub.2, discrete areas of the contact and insulating layers being removed by etching to form viewing windows for the individual LEDs, and with the area of the contact layer bordering the viewing windows being exposed and metallized to provide individual LED electrical contacts.
In a second embodiment, the GaAs-p+ layer is dispensed with and the transparent electrically conducting coating is applied directly on both the insulating layer bordering the Ga.sub.1-y Al.sub.y As viewing windows and over the viewing windows. In a third embodiment, and edge emitting LED variant is provided and in a fourth embodiment, various light barrier designs are proposed for preventing optical crosstalk between the individual LEDs.

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