High resolution fluorescent screen and methods of making and usi

Details High resolution fluorescent screen and methods of making and usi High resolution fluorescent screen and methods of making and usi

1976-03-08

1977-08-02

Borchelt, Archie R.

Radiant energy

Invisible radiation responsive nonelectric signalling

Luminescent device

250487, 250461R, G01J 158, G01N 2138

Patent

active

040398382

ABSTRACT:
A high resolution fluorescent screen including an amorphous coating of fluorescent dye on a substrate transparent to visible light is used to enable an observer to examine photomasks of the type used in manufacturing integrated circuits by using ultraviolet light. The screen converts ultraviolet light passing through the photomask into visible light. The screen is comprised of a transparent substrate having a high resolution amorphous coating of fluorescent dye in a binder on one side. Alternatively, a transparent substrate including a fluorescent material, such as uranium glass, may be used. On the other side of the substrate an ultraviolet blocking filter is applied to prevent ultraviolet light from injuring the eye of an observer using the screen.

REFERENCES:
patent: 3549886 (1970-12-01), Hilborn
patent: 3617744 (1971-11-01), Irish

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