High resolution, dynamic positioning mechanism for specimen...

Details High resolution, dynamic positioning mechanism for specimen... High resolution, dynamic positioning mechanism for specimen...

2005-05-10

2005-05-10

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C318S135000, C310S012060

Reexamination Certificate

active

06891601

ABSTRACT:
A specimen positioning mechanism (10) includes a movable stage (12) movable along multiple axes, a plate (35) connected to and supporting a specimen mounting chuck (14), multiple linear displacement mechanisms (36, 38) coupling the plate to the movable stage and mutually spaced apart at different locations between the movable stage and the plate and separately controllable to change distances between the movable stage and the plate, and a flexible member (22) coupling the movable stage and the plate. The flexible member is motion compliant in three axes of motion. The flexible member in response to linear displacements of the linear displacement mechanisms allows linear and rotational movement of the specimen mounting chuck in the three axes of motion compliance.

REFERENCES:
patent: 5204712 (1993-04-01), Bouwer et al.
patent: 6756751 (2004-06-01), Hunter
patent: 20040080730 (2004-04-01), Binnard

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