High resolution confocal microscope

Details High resolution confocal microscope High resolution confocal microscope

1997-05-15

2000-08-22

Nguyen, Thong

Optical: systems and elements

Compound lens system

Microscope

359368, 359385, G02B 2106, G02B 2100

Patent

active

061081272

ABSTRACT:
A confocal scanning microscope includes a light source which provides a light beam and scanning optics which sweep the light beam across the surface of a sample. Light from the surface or interior of the sample passes through a pinhole lens which focuses the light on a pinhole for detection by an optical detector. An image of the surface may be scanned using the optical detector. An optical element is inserted in a detection arm of the confocal microscope. The optical element provides angular magnification and natural divergence to the beam from the surface of the sample.

REFERENCES:
patent: 5032720 (1991-07-01), White
patent: 5153428 (1992-10-01), Ellis
patent: 5192980 (1993-03-01), Dixon
patent: 5296700 (1994-03-01), Kumagai
patent: 5428475 (1995-06-01), Tanaami et al.
patent: 5532873 (1996-07-01), Dixon
patent: 5579157 (1996-11-01), Tanaami et al.
patent: 5633751 (1997-05-01), Tanaami et al.
"Confocal Microscopy Applied to Metrology of Integrated Circuits," Matthew R.C. Atkinson, Ph.D. Thesis, Dissertation Abstracts International, 53/06-B, p. 2947, 1991.

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