High resolution analytical probe station

Details High resolution analytical probe station High resolution analytical probe station

2007-02-20

2007-02-20

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120

Reexamination Certificate

active

10816114

ABSTRACT:
A method and system for probing with electrical test signals on an integrated circuit specimen using a high resolution microscope positioned for observing a surface of the specimen exposing electrically conductive terminals thereon. A housing is provided with a carrier therein for supporting the specimen in relation to the microscope and a probe assembly is positionable on the surface of the specimen for conveying and acquiring electrical test signals to and from the specimen. A drive system is provided for shifting at least one of the probe and the carrier to a predetermined test position. In one form the system has a heat shield for protecting one of the probe assembly and the carrier from heat energy generated upon operation of the drive system, and in another form, the system has an environmental control for maintaining a desired temperature within the housing so that accurate measurements may be taken from the specimen.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4115736 (1978-09-01), Tracy
patent: 4532423 (1985-07-01), Tojo et al.
patent: 4618767 (1986-10-01), Smith et al.
patent: 4706019 (1987-11-01), Richardson
patent: 4730158 (1988-03-01), Kasai et al.
patent: 4747698 (1988-05-01), Wickramasinghe et al.
patent: 4757255 (1988-07-01), Margozzi
patent: 4772846 (1988-09-01), Reeds
patent: 4807159 (1989-02-01), Komatsu et al.
patent: 4837445 (1989-06-01), Nishioka et al.
patent: 4855673 (1989-08-01), Todokoro
patent: 4866271 (1989-09-01), Ono et al.
patent: 4871938 (1989-10-01), Elings et al.
patent: 4880975 (1989-11-01), Nishioka et al.
patent: 4881029 (1989-11-01), Kawamura
patent: 4894537 (1990-01-01), Blackford et al.
patent: 4992660 (1991-02-01), Kobayashi
patent: 4999494 (1991-03-01), Elings
patent: 5019771 (1991-05-01), Yang et al.
patent: 5077523 (1991-12-01), Blanz
patent: 5084671 (1992-01-01), Miyata et al.
patent: 5107114 (1992-04-01), Nishioka et al.
patent: 5109724 (1992-05-01), Delarue et al.
patent: 5117110 (1992-05-01), Yasutake
patent: 5136162 (1992-08-01), Miyamoto et al.
patent: 5325010 (1994-06-01), Besocke et al.
patent: 5349735 (1994-09-01), Kawase et al.
patent: 5444244 (1995-08-01), Kirk et al.
patent: 5493236 (1996-02-01), Ishii et al.
patent: 5519212 (1996-05-01), Elings et al.
patent: 5530372 (1996-06-01), Lee et al.
patent: 5557156 (1996-09-01), Elings
patent: 5663653 (1997-09-01), Schwindt et al.
patent: 5672816 (1997-09-01), Park et al.
patent: 5929651 (1999-07-01), Leas et al.
patent: 5981948 (1999-11-01), Taniguchi et al.
patent: 6037793 (2000-03-01), Miyazawa et al.
patent: 6191598 (2001-02-01), Hollman
patent: 6198299 (2001-03-01), Hollman
patent: 6335628 (2002-01-01), Schwindt et al.
patent: 6362636 (2002-03-01), Peters et al.
patent: 6621282 (2003-09-01), Hollman
patent: 6744268 (2004-06-01), Hollman
patent: 6838895 (2005-01-01), Hollman
patent: 2001/0009377 (2001-07-01), Schwindt et al.
patent: 2002/0000819 (2002-01-01), Hollman
patent: 2002/0027442 (2002-03-01), Peters et al.
patent: 2003/0042921 (2003-03-01), Hollman
patent: 2004/0056672 (2004-03-01), Hollman
patent: 0 095 370 (1983-11-01), None
patent: 0 027 517 (1984-02-01), None
patent: 0 037 568 (1984-02-01), None
patent: 0 138 250 (1985-04-01), None
patent: 0 069 750 (1987-04-01), None
patent: 0 223 918 (1987-06-01), None
patent: 0 335 398 (1989-10-01), None
patent: 0 110 301 (1989-11-01), None
patent: 0 349 911 (1990-01-01), None
patent: 0 206 016 (1990-09-01), None
patent: 0 386 840 (1990-09-01), None
patent: 0 231 247 (1990-10-01), None
patent: 0 260 734 (1991-01-01), None
patent: 0 423 877 (1991-04-01), None
patent: 0 442 630 (1991-08-01), None
patent: 0 218 829 (1991-11-01), None
patent: 0 480 424 (1992-04-01), None
patent: 0 504 972 (1992-09-01), None
patent: 0 538 861 (1993-04-01), None
patent: 0 546 305 (1993-06-01), None
patent: 0 548 573 (1993-06-01), None
patent: 0 335 398 (1993-07-01), None
patent: 0 548 573 (1994-03-01), None
patent: 0 584 869 (1994-03-01), None
patent: 0 594 084 (1994-04-01), None
patent: 0 095 370 (1998-11-01), None
patent: 63 110637 (1988-05-01), None
patent: 11 233572 (1999-08-01), None
patent: WO-02/07192 (2002-01-01), None

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