High resolution analysis system

Details High resolution analysis system High resolution analysis system

2006-11-21

2006-11-21

Lee, Hwa(Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

Using fiber or waveguide interferometer

C356S450000

Reexamination Certificate

active

07139078

ABSTRACT:
A high resolution sub-surface imaging and analysis system includes at least one repetitive, broad spectral width, optical signal generator. It further includes an optical processing system which provides a probe and a reference beam, applies the probe beam to the target to be analyzed, recombines the beams interferometrically and varies the coherence phase relationship of the two beams. It further includes electronic control and processing systems.

REFERENCES:
patent: 5585913 (1996-12-01), Hariharan et al.
patent: 6507404 (2003-01-01), Nishioki et al.
patent: 6522911 (2003-02-01), Toida et al.
patent: 6728571 (2004-04-01), Barbato

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