High resistivity silicon carbide

Details High resistivity silicon carbide High resistivity silicon carbide

2007-10-29

2010-06-01

Group, Karl E (Department: 1793)

Compositions: ceramic

Ceramic compositions

Carbide or oxycarbide containing

C501S092000

Reexamination Certificate

active

07727919

ABSTRACT:
A recrystallized silicon carbide body is provided that has a resistivity of not less than about 1E5 Ω cm and a nitrogen content comprising nitrogen atoms bonded within the body, wherein the nitrogen content is not greater than about 200 ppm.

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