High repetition rate, uniform volume transverse electric dischar

Details High repetition rate, uniform volume transverse electric dischar High repetition rate, uniform volume transverse electric dischar

1982-05-06

1985-02-05

Sikes, William L.

Coherent light generators

Particular pumping means

Electrical

372 57, 372 87, 31323141, H01S 3097

Patent

active

044981830

ABSTRACT:
A high power excimer laser emits a pulsed output at a high repetition rate in the ultraviolet wavelength region and a uniform power output across the laser beam. By subjecting doped silicon wafers to the pulsed laser output, epitaxial regrowth of silicon crystals can be induced to repair damage to the silicon crystal structure which normally occurs during implantation of the dopant materials.

REFERENCES:
patent: 4223279 (1980-09-01), Bradford, Jr. et al.
patent: 4370175 (1983-01-01), Levatter

Affiliated with

Also associated with

Rating

High repetition rate, uniform volume transverse electric dischar does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High repetition rate, uniform volume transverse electric dischar, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High repetition rate, uniform volume transverse electric dischar will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2085691