Coherent light generators – Particular active media – Gas
Reexamination Certificate
2005-08-30
2005-08-30
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S057000, C372S058000, C372S087000, C372S090000
Reexamination Certificate
active
06937635
ABSTRACT:
The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
REFERENCES:
patent: 4245194 (1981-01-01), Fahlen et al.
patent: 4414488 (1983-11-01), Hoffmann et al.
patent: 4546482 (1985-10-01), Bagaglia et al.
patent: 4547886 (1985-10-01), Kaminski et al.
patent: 4686682 (1987-08-01), Haruta et al.
patent: 4703490 (1987-10-01), Brumme et al.
patent: 4774714 (1988-09-01), Javan
patent: 4876693 (1989-10-01), Lucero et al.
patent: 4959840 (1990-09-01), Akins et al.
patent: 5070513 (1991-12-01), Letardi
patent: 5247534 (1993-09-01), Muller-Horsche
patent: 5359620 (1994-10-01), Akins
patent: 5535233 (1996-07-01), Mizoguchi et al.
patent: 5557629 (1996-09-01), Mizoguchi et al.
patent: 5586134 (1996-12-01), Das et al.
patent: 5771258 (1998-06-01), Morton et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6038055 (2000-03-01), Hansch et al.
patent: 2003/0012234 (2003-01-01), Watson et al.
patent: 2003/0031216 (2003-02-01), Fallon et al.
patent: 2003/0138019 (2003-07-01), Rylov et al.
patent: 04133373 (1992-07-01), None
patent: 2631607 (1997-07-01), None
Nguyen, Thinh, et al., “Diffusion Bonding—An Advanced Material Process for Aerospace Technology”, http://www.vacets.org/vtic97/ttnguyen.htm.
Dyer Timothy S.
Gillespie Walter
Ivaschenko Alex P.
Moosman Bryan
Morton Richard G.
Cray William C.
Cymer Inc.
Cymer, Inc.
Harvey Minsun Oh
Rodriguez Armando
LandOfFree
High rep-rate laser with improved electrodes does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High rep-rate laser with improved electrodes, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High rep-rate laser with improved electrodes will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3440532