Measuring and testing – Vibration – Sensing apparatus
Reexamination Certificate
2006-06-09
2010-10-26
Williams, Hezron (Department: 2856)
Measuring and testing
Vibration
Sensing apparatus
C073S579000
Reexamination Certificate
active
07819011
ABSTRACT:
Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.
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Ayazi Farrokh
Hao Zhili
Bockhop Bryan W.
Bockhop & Associates LLC
Georgia Tech Research Corporation
Shah Samir M
Williams Hezron
LandOfFree
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