High Q inductor integration

Details High Q inductor integration High Q inductor integration

2007-07-24

2007-07-24

Ha, Nathan W. (Department: 2814)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Isolation by pn junction only

Reexamination Certificate

active

10121242

ABSTRACT:
In an inductor integration process, a high Q inductor is achieved by forming an AlCu inductor via prior to depositing the inductor dielectric.

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