High purity sputtering target material and method for preparing

Details High purity sputtering target material and method for preparing High purity sputtering target material and method for preparing

1987-12-14

1990-01-23

Rosenberg, Peter D.

Specialized metallurgical processes, compositions for use therei

Processes

Electrothermic processes

75 1018, 75 84R, 75148, 75 30, 75420, 75 83, 75129, 75590, C22B 400

Patent

active

048955922

ABSTRACT:
Sputtering targets and a method for preparing them by melting the components of a rare earth-transition metal alloy in an inert atmosphere in the inner section of a crucible assembly having inner and outer sections separating by thermally insulating material and cooling the melt in the inner section.

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Lasday, S. B., "Ceramic Refractory Coatings--Their Application and Performance", Ind. Heat., vol. 69, No. 12, pp. 38-40, (12/82), (abstract only).
Lasday, S. B., "Nature of Ceramic Coatings and Their Benefits in Thermal Processes", Ind. Heat., vol. 49, No. 8, pp. 49-52, (8/82), (abstract only).
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