High-purity silicone ladder polymer and process producing the sa

Details High-purity silicone ladder polymer and process producing the sa High-purity silicone ladder polymer and process producing the sa

1993-08-23

1995-03-21

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 14, C08G 7706

Patent

active

053996488

ABSTRACT:
High-purity silicone ladder polymer a weight average molecular weight of 600-1,000,000 and a molecular weight distribution of no more than 10 and it contains no more than 1 ppm each of sodium, potassium, iron, copper, lead and chlorine and no more than 1 ppb each of uranium and thorium. This silicone ladder polymer is very pure, has high molecular weight and yet can be produced easily. Hence, it can advantageously be used as a material for making surface protective or inter-level insulation films in semiconductor devices.

REFERENCES:
patent: 5023204 (1991-06-01), Mitsubishi
patent: 5057336 (1991-10-01), Adachi et al.
patent: 5081202 (1992-01-01), Adachi et al.
patent: 5087553 (1992-02-01), Mitsubishi
patent: 5180691 (1993-01-01), Adachi et al.
patent: 5236984 (1993-08-01), Yamamoto et al.
Japanese Patent Public Disclosure No. 3-207719, published Sep. 11, 1991.

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