High purity silicon nitride polishing compound

Details High purity silicon nitride polishing compound High purity silicon nitride polishing compound

1985-12-05

1987-09-01

Swisher, Nancy A.

Abrasive tool making process, material, or composition

With inorganic material

51308, 428331, 428700, 428698, C04B 3564

Patent

active

046906932

ABSTRACT:
A polishing compound is disclosed which is relatively high purity silicon nitride, the silicon nitride comprising particles having equiaxial crystals, the particle size being from about 0.03 to about 5 microns.

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patent: 4304576 (1981-12-01), Hattori et al.
patent: 4323325 (1982-04-01), Samanta et al.
patent: 4406667 (1983-09-01), Sarin et al.
patent: 4557244 (1985-12-01), Allor

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