High purity phenyl silicone ladder polymer and method for produc

Details High purity phenyl silicone ladder polymer and method for produc High purity phenyl silicone ladder polymer and method for produc

1989-11-17

1992-01-14

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 12, 556489, C08G 7700

Patent

active

050812025

ABSTRACT:
High purity phenyl silicone ladder polymer, and a method for producing such polymer, suitable for use as the protective film, the interlayer insulating film, etc. in the fabrication of semiconductor elements, which polymer contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following general formula (I): ##STR1## (where: R.sub.1 to R.sub.4 denote respectively hydrogen or a lower alkyl group; n is an integer of from 8 to 1,000); or the following general formula (II): ##STR2## (where: n is an integer of from 8 to 1,600).

REFERENCES:
patent: 3017386 (1962-01-01), Brown, Jr. et al.
patent: 4399266 (1983-08-01), Matsumura et al.
patent: 4670299 (1987-06-01), Fukuyama et al.
Journal of Polymer Science, vol. 28, pp. 17-34, 1958, M. M. Sprung et al., "The Hydrolysis of N-Amyltriethoxysilane and Phenyltriethoxysilane".

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