Metal treatment – Process of modifying or maintaining internal physical... – Heating or cooling of solid metal
Reexamination Certificate
2011-05-10
2011-05-10
King, Roy (Department: 1733)
Metal treatment
Process of modifying or maintaining internal physical...
Heating or cooling of solid metal
C420S441000
Reexamination Certificate
active
07938918
ABSTRACT:
A high purity Ni—V alloy, high purity Ni—V alloy target and high purity Ni—V alloy thin film wherein the purity of the Ni—V alloy excluding Ni, V and gas components is 99.9 wt % or higher, and the V content variation among ingots, targets or thin films is within 0.4%. With these high purity Ni—V alloy, high purity Ni—V alloy target and high purity Ni—V alloy thin film having a purity of 99.9 wt % or higher, the variation among ingots, targets or thin films is small, the etching property is improved, and isotopic elements such as U and Th that emit alpha particles having an adverse effect on microcircuits in a semiconductor device are reduced rigorously. Further provided is a method of manufacturing such high purity Ni—V alloys capable of effectively reducing the foregoing impurities.
REFERENCES:
patent: 5334267 (1994-08-01), Taniguchi et al.
patent: 5964966 (1999-10-01), Goyal et al.
patent: 6267827 (2001-07-01), Shindo et al.
patent: 6342114 (2002-01-01), Lam et al.
patent: 6485542 (2002-11-01), Shindo et al.
patent: 7435325 (2008-10-01), Shindo et al.
patent: 7605481 (2009-10-01), Yamakoshi et al.
patent: 7618505 (2009-11-01), Yamakoshi et al.
patent: 2004/0256035 (2004-12-01), Yamakoshi et al.
patent: 2006/0037680 (2006-02-01), Yamakoshi
patent: 2007/0098590 (2007-05-01), Shindo
patent: 2009/0004498 (2009-01-01), Shindo et al.
patent: 62-040363 (1987-02-01), None
patent: 11-036065 (1999-02-01), None
patent: 2001-262328 (2001-09-01), None
W.B. Pearson et al., “The Constitution and Structure of Nickel-Vanadium Alloys in the Region 0-60 At.-% Vanadium”, Journal of the Institute of Metals, vol. 80, pp. 641-652, Feb. 1952.
H.A. Moreen et al., “Ni8X Phases in the SYstems Ni-V, Ni-V-Nb, and Ni-V-Ta”, Journal of Materials Science, vol. 6, pp. 1425-1432, 1971 (month unknown).
Massalski et al., “Binary Alloy Phase Diagrams”, vol. 2, American Society for Metals, pp. 1769, 1772 & 1773, 1986 (month unknown).
Shindo Yuichiro
Yamakoshi Yasuhiro
Howson & Howson LLP
JX Nippon Mining & Metals Corporation
King Roy
Roe Jessee R.
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