Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2006-10-03
2006-10-03
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C137S486000, C222S389000, C222S386500
Reexamination Certificate
active
07114517
ABSTRACT:
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.
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Barger Michael J.
Dille Joseph C.
Pawlas Gary E.
Sund Wesley E.
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